Support ring with masked edge

A support ring for semiconductor processing, comprising:

• a ring shaped body comprising:
• an inner edge and an outer edge;
• a first side and a second side;
• an annular shoulder extending from the first side of the ring shaped body at the inner edge;
• and
• a rim extending from the second side of the ring shaped body at the outer edge;
• and
• a coating on the first side of the ring shaped body between the outer edge and the annular shoulder.

A support ring for semiconductor processing, comprising:

• a ring shaped body comprising:
• an inner edge and an outer edge;
• a first side and a second side;
• a shoulder extending from the first side of the ring shaped body at the inner edge;
• and
• a rim extending from the second side of the ring shaped body;
• and
• a coating on the first side of the ring shaped body between the outer edge and the shoulder, the coating abutting the shoulder.