Dynamic random access memory with low leakage current and related manufacturing method thereof
AssigneeEtron Technology, Inc.
InventorLi-Ping Huang
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AssigneeEtron Technology, Inc.
InventorLi-Ping Huang
Estimating the term…
A manufacturing method of dynamic random access memory (DRAM) with low leakage current includes forming a plurality of gates within a substrate of the DRAM; forming a plurality of drain/sources within the substrate of the DRAM by a first ion implantation; and forming a plurality of lightly doped drains under all of the plurality of drain/sources or partial drain/sources of the plurality of drain/sources by a second ion implantation after the plurality of drain/sources are formed. The plurality of lightly doped drains is used for reducing a leakage current within the DRAM, and the second ion implantation has a predetermined incident angle.
A manufacturing method of a dynamic random access memory with low leakage current, comprising:
A dynamic random access memory with low leakage current, comprising:
A dynamic random access memory with low leakage current, comprising:
A dynamic random access memory with low leakage current, comprising:
A dynamic random access memory with low leakage current, comprising:
Dependencies are inferred from the claim text.