Transmission scanning microscopy including electron energy loss spectroscopy and observation method thereof

A scanning transmission microscope comprising:

• an electron source that emits a primary electron beam;
• a stage drive mechanism that moves a sample table holding a sample;
• an objective magnetic field lens that focuses the primary electron beam on the sample;
• a scanning coil that two-dimensionally scans the primary electron beam irradiated on the sample;
• a STEM detector that detects electrons transmitted through the sample;
• and
• an electron energy loss spectrum (EELS) detector that detects an energy loss spectrum of electrons transmitted through the sample,
• wherein acceptance angles of the STEM detector and the EELS detector by changing disposition of the sample with respect to an optical axis direction of the primary electron beam are controlled, and
• wherein the disposition of the sample is changed with respect to the optical axis direction of the primary electron beam according to switching the STEM detector between bright field STEM observation, dark field STEM observation, and EELS observation.