US 10,373,795 B2 · Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

Abstract

Provided are new techniques for fault analysis in IC semiconductor devices, including system designs and methods to enable the probing of circuitry within an IC device under test (DUT) using electron beam (e-beam) techniques while the DUT is being stimulated electrically, or while the device is active on its own or within a host system mounted in a circuit board or other module. The DUT could be a packaged IC, or an IC in some unpackaged form. To create a local evacuated volume immediately outside the e-beam tool, a sealing element is sealed against or around the DUT for a localized seal. Such an arrangement obviates the need for vacuum feedthroughs of possibly thousands of signals required to operate and monitor the DUT, and further enables probing of a DUT while it is operating in its normal environment, such as installed on a circuit board in its system, or on a tester.

Claims21

Dependent claims

A method of examining an integrated circuit (IC) using a scanning electron microscope (SEM) having an SEM column with an SEM column opening at one end from which an electron beam is emitted, the method comprising:

sealing the SEM column opening around a target area on a back side of the IC to create a sealed volume at the SEM column opening, the target area forming a part of an enclosure of the sealed volume;
evacuating the sealed volume;
applying a voltage to a circuit element of the IC, the voltage inducing an electrical potential in the target area;
and
scanning the electron beam over the target area to detect the electrical potential at the surface of the target area.

2 more elements

Dependencies are inferred from the claim text.

Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

Life of this patent

Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

Life of this patent

Abstract

Claims21