Micro-electro-mechanical system and method for producing the same

MEMS comprising:

• a deflectable actuator plate;
• and
• an abutment area;
• wherein an integral piezoelectric functional layer of the deflectable actuator plate is configured across an active area of the deflectable actuator plate;
• wherein the deflectable actuator plate comprises a controlled state (on-state) and a non-controlled state (off-state) and effects a hollow warp in at least one of the two states;
• wherein the abutment area of a hollow side is disposed facing a hollow side of the deflectable actuator plate;
• wherein the deflectable actuator plate is configured to provide in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area;
• and
• wherein the deflectable actuator plate is spaced apart from the abutment area in the other state;
• wherein an elliptical ring exists, which overlaps by more than 95% with the active area and whose elliptical ring area takes up at least 60% of a total area of the deflectable actuator plate;
• wherein the elliptical ring comprises an outer elliptical trajectory with a main axis and a minor axis disposed perpendicularly to the main axis;
• and
• wherein a ratio between the main axis and the minor axis comprises a value in the range of greater than or equal to 0.25 and less than or equal to 4.