Mirror assembly with heat transfer mechanism

An optical element assembly for directing a beam, the optical element assembly comprising:

• a base including a plurality of recesses;
• and
• a plurality of elements, each of the plurality of elements including (i) an optical element, (ii) a stage that retains the optical element, the stage including a transfer region that is sized and shaped to fit within one of the plurality of recesses with a gap therebetween, and a connector region that is connected to and extends between the optical element and the transfer region such that the transfer region is rigidly connected to the optical element, (iii) a mover assembly that is coupled to the optical element, the mover assembly moving the optical element and the stage about a first axis and about a second axis that is orthogonal to the first axis relative to the base while maintaining the transfer region spaced apart the gap from the base, the mover assembly being secured to the connector region between the optical element and the transfer region, the mover assembly moving the optical element to move approximately about a movement point that is near a center of a reflective surface of the optical element, and (iv) a thermally conductive medium positioned within the gap between the transfer region and the base to transfer heat from the transfer region to the base so that heat transferred with the thermally conductive medium does not cause thermal distortion of the mover assembly;
• wherein the optical elements are arranged in a patterned array such that the optical elements are adjacent to one another and are positioned in approximately the same plane;
• wherein for each of the plurality of elements the mover assembly includes (i) a first axis movement assembly that moves the optical element about the first axis, the first axis movement assembly including a first flexure so that movement of the optical element about the first axis with the first axis movement assembly is decoupled from the movement of the optical element about the second axis;
• and (ii) a second axis movement assembly that moves the optical element about the second axis, the second axis movement assembly including a second flexure so that movement of the optical element about the second axis with the second axis movement assembly is decoupled from the movement of the optical element about the first axis;
• and
• wherein the mover assembly includes a linkage that is coupled to the optical element, and a mover that pivots the linkage about a pivot axis;
• wherein the movement point is in a movement plane defined by the first axis and the second axis, and wherein the pivot axis is not in the movement plane.

A method for directing a beam, the method comprising the steps of:

• providing a base including a plurality of recesses;
• positioning a plurality of optical elements in a path of the beam, the plurality of optical elements being arranged in a patterned array such that the plurality of optical elements are adjacent to one another and are positioned in approximately the same plane;
• retaining each of the plurality of optical elements with a corresponding stage, the stage including a transfer region that is positioned within one of the plurality of recesses with a gap therebetween, and a connector region that is connected to and extends between the optical element and the transfer region such that the transfer region is rigidly connected to the optical element;
• moving each of the plurality of optical elements with a corresponding mover assembly about a first axis and about a second axis that is orthogonal to the first axis relative to the base while maintaining the gap between the base and the corresponding transfer region, wherein, the corresponding mover assembly is coupled in direct contact with the corresponding connector region between the optical element and the transfer region;
• transferring heat away from each of the plurality of optical elements with the corresponding transfer region;
• and
• transferring heat away from the transfer region for each stage with a thermally conductive medium positioned within the gap between the transfer region and the base so that heat transferred with the thermally conductive medium does not cause thermal distortion of the mover assembly.

An optical element assembly for directing a beam, the optical element assembly comprising:

• a base including a plurality of recesses;
• and
• a plurality of elements, each of the plurality of elements including (i) an optical element including a reflective surface, (ii) a stage that retains the optical element, the stage including a transfer region that is sized and shaped to fit within one of the plurality of recesses with a gap therebetween, and a connector region that is connected to and extends between the optical element and the transfer region such that the transfer region is rigidly connected to the optical element, (iii) a mover assembly including a linkage that is coupled to the optical element, and a mover that pivots the linkage about a pivot axis, the mover assembly moving the optical element and the stage about a first axis and about a second axis that is orthogonal to the first axis relative to the base while maintaining the gap, and (iv) a thermally conductive medium positioned within the gap between the transfer region and the base to transfer heat from the transfer region to the base so that heat transferred with the thermally conductive medium does not cause thermal distortion of the mover assembly;
• wherein the optical elements are arranged in a patterned array such that the optical elements are adjacent to one another and are positioned in approximately the same plane;
• and
• wherein the mover assembly moves the optical element about a movement point on the reflective surface that is in a movement plane defined by the first axis and the second axis, and wherein the pivot axis is not in the movement plane.