3D chip testing through micro-C4 interface
AssigneeInternational Business Machines Corporation
InventorsVictor A. Garibay, Chetan Mehta, Doorlabh Panjwani, Tingdong Zhou
Life of this patent
Estimating the term…
Abstract
Structures and methods for directly testing a semiconductor wafer having micro-solder connections. According to one embodiment, a method forms a pattern of micro-solder connections coupled with a through substrate via (TSV) that can be directly tested by electrical probing, without the use of a testing interposer. According to another embodiment, a method tests the pattern of micro-solder connections. According to another embodiment, a novel electrical probe tip structure has contacts on the same pitch as the pattern of micro-solder connections.
Claims6
A method, comprising:
- assigning an electrical test signal to a pattern of micro-solder connections formed on a first surface of an IC chip, wherein a center of an individual micro-solder connection in the pattern is separated from a center of another individual micro-solder connection by a distance of approximately 62 μm;
- providing power to the pattern of micro-solder connections for electrical testing from a second surface located on an opposite side of the IC chip using a through substrate via (TSV), wherein the pattern of micro-solder connections comprises:
- the TSV;
- a center micro-solder connection centered on the TSV;
- and
- six (6) micro-solder connections on the first surface positioned around the TSV in a hexagonal pattern, wherein two (2) micro-solder connections are formed on the first surface adjacent to a top side of the TSV, one (1) micro-solder connection is formed on the first surface adjacent to a left side of the TSV, one (1) micro-solder connection is formed on the first surface adjacent to a right side of the TSV, and two (2) micro-solder connections are formed on the first surface adjacent to a bottom side the TSV;
- and
- testing the IC chip using electrical probing by contacting the pattern of micro-solder connections directly with a contact point of a single electrical testing probe tip, said single electrical probe tip comprising:
- a circular base;
- and
- a single circular shaped raised contact point centered on the circular base, wherein the raised contact point has a width or diameter less than a width or diameter of the circular base.
Dependencies are inferred from the claim text.