MEMS accelerometer with proof masses moving in an anti-phase direction

A sensor comprising:

• a substrate;
• and
• a mechanical structure, wherein the mechanical structure includes:
• at least two proof masses including a first proof mass and a second proof mass,
• a flexible coupling between the at least two proof masses and the substrate;
• and
• a transducer for measuring motion in a direction normal and parallel to a plane of the substrate of the mechanical structure relative to the substrate,
• wherein the at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane,
• wherein the at least two proof masses move in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane, and
• wherein the transducer is a capacitive sensor.