Index of refraction sensor system with dual mode temperature control
AssigneeEntegris, Inc.
InventorJohn Anthony Balchunas
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Abstract
A sensor system (100) utilizes temperature control systems (262) and methods to achieve and maintain a sample in a sample chamber (110) at a sampling temperature. Such sensor systems and methods may employ a dual mode temperature controller including a spike mode (SMC) controller (274) and a proportional-integral-derivative (PID) mode controller (272). Based on a temperature of the sample, the temperature controller of the sensor system can initially enter the spike mode or the PID mode.
Claims15
A sensor system for measuring the index of refraction of a sample, the sensor system comprising:
- a sample chamber for receiving a sample;
- a first temperature sensor coupled to the sample chamber;
- one or more heating and cooling elements coupled to the sample chamber;
- an index of refraction sensor exposed to the sample chamber, the sample chamber having a sampling temperature setpoint;
- and
- a system controller comprising a memory having the sampling temperature setpoint of the sample chamber stored therein, and a spike mode controller (SMC), the system controller electronically coupled to and in communication with the first temperature sensor, the one or more heating and cooling elements and the index of refraction sensor, wherein if the system controller determines that a temperature of the sample chamber is outside the sampling temperature setpoint as measured by the first temperature sensor, the system controller is configured to activate the spike mode controller (SMC) to operate one or more heating and cooling elements to rapidly bring the temperature of the sample within the sampling temperature setpoint of the index of refraction sensor as determined by the first temperature sensor.
A method of measuring the index of refraction of a sample, the method comprising:
- receiving a sample in a sampling chamber of sensor system, the sensor system comprising a system controller in electronic communication with first temperature sensor coupled to the sample chamber, one or more heating and cooling elements coupled to the sample chamber, and an index of refraction sensor exposed to the sample chamber, the system controller comprising a spike mode controller (SMC) and a PID mode controller;
- measuring a temperature of the sample via the temperature sensor;
- determining if the temperature of the sample chamber is within a sampling temperature setpoint,
- activating a spike mode controller (SMC) to operate one or more heating and cooling to reach a maximum hot or a maximum cold temperature if the system controller determines that a temperature of the sample is outside the sampling temperature setpoint as measured by the temperature sensor;
- activating a PID mode controller to maintain the temperature of the sample within the sampling temperature setpoint if the system determines that the temperature of the sample is within the sampling temperature setpoint as measured by the first temperature setpoint;
- and
- measuring an index of refraction of the sample when the temperature of the sample is within the sampling temperature setpoint.
Dependencies are inferred from the claim text.