Method and apparatus for wavefront sensing

Abstract

A method for performing optical wavefront sensing includes providing an amplitude transmission mask having a light input side, a light output side, and an optical transmission axis passing from the light input side to the light output side. The amplitude transmission mask is characterized by a checkerboard pattern having a square unit cell of size Λ. The method also includes directing an incident light field having a wavelength λ to be incident on the light input side and propagating the incident light field through the amplitude transmission mask. The method further includes producing a plurality of diffracted light fields on the light output side and detecting, at a detector disposed a distance L from the amplitude transmission mask, an interferogram associated with the plurality of diffracted light fields. The relation 0 < L < 1 8 ⁢ Λ 2 λ ⁢ ⁢ or ⁢ ⁢ 1 4 ⁢ Λ 2 λ ⁢ ( 2 ⁢ n - 1 ) < L < 1 4 ⁢ Λ 2 λ ⁢ ( 2 ⁢ n + 1 ) is satisfied, where n is an integer greater than zero.

Dependencies are inferred from the claim text.