Black silicon blackbody calibration target
AssigneeThe United States of America as represented by the Administrator of the National Aeronautics and Space Administration
InventorsWilliam R. Johnson, Karl Y. Yee, Simon J. Hook
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Abstract
The disclosure is directed to a blackbody calibration target having a textured silicon substrate comprising a base comprising a plurality of needle like structures extending away from the base and having a total emissivity of greater than 99.5% from an electromagnetic radiation source having a wavelength greater than or equal to about 400 nanometers and less than or equal to about 1 mm. The disclosure is further directed to a blackbody calibration target system, and instrument which includes the blackbody calibration target, and a method of calibrating an instrument.
Claims17
A blackbody calibration target comprising:
- a textured silicon substrate comprising a base comprising a plurality of needle like structures extending away from the base, wherein the textured silicon substrate has a total emissivity of greater than 99.5% from an electromagnetic radiation source having a wavelength greater than or equal to 400 nanometers and less than or equal to 1 millimeter.
A blackbody calibration system comprising a blackbody calibration target in thermal communication with a controlled temperature source, the blackbody calibration target comprising a textured silicon substrate comprising a base comprising a plurality of needle like structures extending away from the base, wherein the textured silicon substrate has a total emissivity of greater than 99.5% from an electromagnetic radiation source having a wavelength greater than or equal to 400 nanometers and less than or equal to 1 millimeter.
An instrument comprising:
- an electromagnetic radiation source in optical communication with a detector along an optical path;
- and a blackbody calibration system arrangable within the optical path, wherein the blackbody calibration system comprises a blackbody calibration target in thermal communication with a controlled temperature source, the blackbody calibration target comprising a textured silicon substrate comprising a base comprising a plurality of needle like structures extending away from the base to an average height of greater than or equal to about 1 micrometer and less than or equal to 50 micrometers, determined perpendicular to the base, and having an average width of less than or equal to about 1 micrometer determined at an average midpoint height of the structures parallel to the base, the blackbody calibration target having a total emissivity of greater than 99.5% at a wavelength greater than or equal to 400 nanometers an less than or equal to about 1 millimeter.
Dependencies are inferred from the claim text.