Integrated electronic device for detecting ultraviolet radiation

An integrated electronic device, comprising:

• a cathode region having a surface;
• a first anode region and a second anode region laterally staggered with respect to one another and formed on the surface of the cathode region;
• a separation region of insulating material formed on the surface of the cathode region;
• a first sensor including the cathode region and the first anode region that in operation generates a first electrical signal responsive to incident ultraviolet radiation, the ultraviolet radiation having a spectral range corresponding to the UVA band and the UVB band and the first sensor having a first non-zero spectral efficiency for incident ultraviolet radiation in the spectral range;
• a second sensor including the cathode region and the second anode region that in operation generates a second electrical signal responsive to incident ultraviolet radiation in the spectral range, the second electrical signal independent of the first electrical signal and the second sensor having a second non-zero spectral efficiency different than the first spectral efficiency.

A method, comprising:

• forming a cathode region of semiconductor material having a surface;
• forming a first patterned anode region on the surface of cathode region, the first patterned anode region including a plurality of sub-regions having portions of the surface of the cathode region exposed between adjacent ones of the sub-regions;
• forming a second patterned anode region on the surface of the cathode region, the second patterned anode region including a plurality of sub-regions having portions of the surface of the cathode region exposed between adjacent ones of the sub-regions;
• forming a filtering region in association with one of the first and second patterned anode regions to form a first sensor including the cathode region and the first patterned anode region and having a spectral range of the UVA and UVB bands and a first spectral efficiency over these bands, and a second sensor including the cathode region and the second patterned anode region having a spectral range of the UVA and UVB bands and a second spectral efficiency over these bands that is different from the first spectral efficiency.