Shape measurement device, structural object production system, shape measurement method, structural object production method, shape measurement program, and recording medium

A shape measurement device that measures a shape of an object to be measured, the device comprising:

• a probe including:
• a projection optical system that projects a line-shaped pattern onto a surface of the object to be measured, the line-shaped pattern being generated by adjusting an intensity distribution of light emitted from a light source or by scanning light emitted from a light source;
• and
• an image capturing device that detects an image of the line-shaped pattern projected onto the object to be measured;
• a movement mechanism that rotates the object to be measured and the probe relative to each other so that the object to be measured rotates relative to the probe around a rotation axis and that linearly moves at least one of the probe and the object to be measured relatively in at least a radial direction that intersects with a rotation direction of the relative rotational movement;
• and
• a controller that is connected to the movement mechanism communicably and that controls the movement mechanism so that the movement mechanism rotates the object to be measured and the probe relative to each other, and linearly moves at least one of the probe and the object to be measured relatively, simultaneously,
• wherein, while the movement mechanism relatively rotates the object with respect to the probe, the controller controls a maximum optical probe movement amount per single rotation in accordance with an angle of tilt between the orientation of the line-shaped pattern and a line perpendicular to the rotation direction in a measurement plane of the object to be measured.

A shape measurement method for measuring a shape of an object to be measured by irradiating a surface of the object to be measured with a line-shaped pattern from a probe or projecting a spot pattern from the probe while scanning in at least a linear scanning range and causing the probe to detect an image of the pattern projected onto the object to be measured, the method comprising:

• rotating the object to be measured and the probe relative to each other so that the object to be measured rotates relative to the probe around a rotation axis and linearly moving at least one of the probe and the object to be measured relatively in a radial direction that intersects with a rotation direction of the relative rotational movement;
• setting a measurement region on the surface of the object to be measured;
• setting an actual measurement region including an actual measurement start position on the surface of the object to be measured and an actual measurement end position on the surface of the object to be measured on the basis of the measurement region;
• and
• setting whichever of the actual measurement start position and the actual measurement end position is closer to a rotation axis to be closer to the rotation axis than the measurement region, and setting whichever of the actual measurement start position and the actual measurement end position is located further outward in the radial direction to be further from the rotation axis than the measurement region.

A non-transitory computer readable medium storing shape measurement program for measuring a shape of an object to be measured by irradiating a surface of the object to be measured with a line-shaped pattern from a probe or projecting a spot pattern from the probe while scanning in at least a linear scanning range and causing the probe to detect an image of the pattern projected onto the object to be measured, the program causing a computer to execute:

• rotating the object to be measured and the probe relative to each other so that the object to be measured rotates relative to the probe around a rotation axis and linearly moving at least one of the probe and the object to be measured relatively in a radial direction that intersects with a rotation direction of the relative rotational movement;
• setting a measurement region on the surface of the object to be measured;
• setting an actual measurement region including an actual measurement start position on the surface of the object to be measured and an actual measurement end position on the surface of the object to be measured on the basis of the measurement region;
• and
• setting whichever of the actual measurement start position and the actual measurement end position is closer to a rotation axis to be closer to the rotation axis than the measurement region, and setting whichever of the actual measurement start position and the actual measurement end position is located further outward in the radial direction to be further from the rotation axis than the measurement region.