US 10,371,378 B2 · Method and apparatus for monitoring port blockage for TDLAS measurements in harsh environments

Abstract

A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a TDLAS optical head with a window between the sight tube and the TDLAS optical head. The method includes the steps of providing a photo sensor in the TDLAS optical head, the photo sensor being positioned to receive light emitted by a light emitting process within the process chamber. An emission signal produced by light emitted by the light emitting process within the process chamber being received by the photo sensor is monitored. A determination is made if the emission signal is degrading.

Claims14

Dependent claims

A method of monitoring blockage of a sight tube attached to a wall of a process chamber, the sight tube being operatively associated with a tunable diode laser absorption spectroscopy (TDLAS) optical head with a window between the sight tube and the TDLAS optical head, the method comprising:

monitoring, by a processor, an emission signal generated by a photo sensor and representative of light emitted by combustion within the process chamber, the photo sensor being located in the TDLAS optical head;
and
determining, by the processor, that the emission signal is degrading as compared to a history of prior emission signals, wherein degrading of the emission signal indicates blockage of the site tube;
initiating, by the processor, clearing of the sight tube, when it is determined that the emission signal is degrading.

1 more element

A method of monitoring blockage in a plurality of sight tubes attached to at least one wall of a process chamber, each sight tube being operatively associated with a tunable diode laser absorption spectroscopy (TDLAS) optical head with a window between the sight tube and the TDLAS optical head, the method comprising:

monitoring, by a processor, an emission signal generated by a photo sensor and representative of light emitted by combustion within the process chamber, the photo sensor being located in the TDLAS optical head;
and
determining, by the processor, that an emission signal received by one of the photo sensors is degrading based on the emission signal as compared to a history of prior emission signals from the one of the photo sensors, wherein degrading of the emission signal indicates blockage of the site tube associated with the one of the photo sensors, and,
when it is determined that the emission signal received by the one photo sensor is degrading, determining, by the processor, if each emission signal received by the other photo sensors is degrading;
and
initiating, by the processor, clearing of the sight tube associated with the one of the photo sensors, when it is determined that the emission signals generated by other of the photo sensors are not degrading.

3 more elements

Dependencies are inferred from the claim text.

Method and apparatus for monitoring port blockage for TDLAS measurements in harsh environments

Life of this patent

Method and apparatus for monitoring port blockage for TDLAS measurements in harsh environments

Life of this patent

Abstract

Claims14