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US 10,371,279 B2Granted
Actuator
AssigneeSumitomo Heavy Industries, Ltd.
InventorTatsuya Yoshida
Life of this patent
Estimating the term…
Abstract
An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section.
Claims12
An actuator comprising:
- a guide that extends in one direction, at least one surface of the guide is open;
- and
- a slider that is movable in an axial direction with respect to the guide so as to be floated with respect to the guide and guided by the guide, the slider has an air servo chamber for driving the slider,
- wherein the slider has an air pad that is configured to eject compression gas, the slider has exhaust grooves that are configured to allow the compression gas ejected from the air pad to be discharged, and
- wherein a first one of the exhaust grooves surrounds the air pad, a second one of the exhaust grooves surrounds the first one of the exhaust grooves and a third one of the exhaust grooves surrounds the second one of the exhaust grooves.
2 more elements
Dependencies are inferred from the claim text.