Fluid controller with diaphragm
AssigneeFujikin Incorporated
InventorsIchiro Tokuda, Akihiro Harada, Hidenori Kiso, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
Life of this patent
Estimating the term…
Loading patent…
AssigneeFujikin Incorporated
InventorsIchiro Tokuda, Akihiro Harada, Hidenori Kiso, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
Estimating the term…
A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holder 7 is set.
A fluid controller comprising:
Dependencies are inferred from the claim text.