Micropump having a flowmeter, and method for producing same

A micropump with a deformable membrane, comprising:

• a first chamber, one wall of which includes a first deformable membrane and an actuator of the first deformable membrane;
• a second chamber including a second deformable membrane and a third chamber, including a third deformable membrane, the second chamber and the third chamber being connected together through a first channel, a depth of the first channel being smaller than a depth of one of the second chamber and the third chamber, at least one of the second and third chambers being connected through a second channel to the first chamber, and the third chamber being between the first channel and the second channel, each of the second chamber and third chamber further having a detector associated therewith of deformation of the corresponding deformable membrane portion under action of a fluid flowing in the micropump, but not including an activation mechanism;
• a fourth chamber, connected to the second chamber through a channel and including a fourth deformable membrane and an actuator of the fourth deformable membrane;
• a fifth chamber, connected to the first chamber or to the third chamber through a channel, and including a fifth deformable membrane and an actuator of the fifth deformable membrane;
• a first substrate;
• and
• a second substrate that is above the first substrate, the first substrate and the second substrate being assembled to each other, each of the chambers being made in the first substrate and being below the second substrate, each deformable membrane being made in the second substrate, the detector associated with the second chamber, the detector associated with the third chamber, and the actuator of the first deformable membrane all being positioned on a same upper surface of the second substrate.

A method for making a micropump that includes a first chamber, one wall of which includes a first deformable membrane and an actuator of the first deformable membrane, a second chamber including a second deformable membrane and a third chamber, including a third deformable membrane, the second chamber and the third chamber being connected together through a first channel, a depth of the first channel being smaller than a depth of one of the second chamber and the third chamber, at least one of the second and third chambers being connected through a second channel to the first chamber, and the third chamber being between the first channel and the second channel, each of the second chamber and third chamber having a detector associated therewith detecting deformation of the corresponding deformable membrane portion under action of a fluid flowing in the micropump, but not including an activation mechanism, the method comprising:

• selecting a first substrate and a second substrate;
• making the chambers and the first channel in the first substrate, the depth of the first channel being smaller than the depth of the one of the second chamber and the third chamber, and the third chamber being between the first channel and the second channel;
• assembling the first substrate with the second substrate;
• then making the deformable membranes, by thinning the second substrate;
• and
• forming the detectors, on or in the deformable membranes, the detectors including a detector being positioned above the third chamber and a detector being positioned above the second chamber, and forming an actuator of the first deformable membrane,
• the second substrate being above the first substrate, each of the chambers being made in the first substrate and being below the second substrate, each deformable membrane being made in the second substrate, the detector associated with the second chamber, the detector associated with the third chamber, and the actuator of the first deformable membrane all being positioned on a same upper surface of the second substrate.

A micropump with a deformable membrane, comprising:

• a first chamber, one wall of which includes a first deformable membrane and means for actuating the first deformable membrane;
• a second chamber including a second deformable membrane and a third chamber, including a third deformable membrane, the second chamber and the third chamber being connected together through a first channel, a depth of the first channel being smaller than a depth of one of the second chamber and the third chamber, at least one of the second and third chambers being connected through a second channel to the first chamber, and the third chamber being between the first channel and the second channel;
• each of the second chamber and third chamber having detection means associated therewith for detecting deformation of the corresponding deformable membrane portion under action of a fluid flowing in the micropump, but not including activation means;
• a first substrate;
• and
• a second substrate that is above the first substrate, the first substrate and the second substrate being assembled to each other, each of the chambers being made in the first substrate and being below the second substrate, each deformable membrane being made in the second substrate, the detection means associated with the second chamber, the detection means associated with the third chamber, and the means for actuating the first deformable membrane all being positioned on a same upper surface of the second substrate.

A micropump with a deformable membrane, comprising:

• a first chamber, one wall of which includes a first deformable membrane and means for actuating the first deformable membrane;
• a second chamber including a second deformable membrane and a third chamber, including a third deformable membrane, the second chamber and the third chamber being connected together through a first channel, a depth of the first channel being smaller than a depth of one of the second chamber and the third chamber, at least one of the second and third chambers being connected through a second channel to the first chamber, the third chamber being between the first channel and the second channel, and each of the second chamber and third chamber further having detection means associated therewith for detecting deformation of the corresponding deformable membrane portion under action of a fluid flowing in the micropump, but not including activation means;
• a fourth chamber, connected to the second chamber through a channel and including a fourth deformable membrane and means for actuating the fourth deformable membrane;
• a fifth chamber, connected to the first chamber through a channel, and including a fifth deformable membrane and means for actuating the fifth deformable membrane;
• a first substrate;
• and
• a second substrate that is above the first substrate, the first substrate and the second substrate being assembled to each other, each of the chambers being made in the first substrate and being below the second substrate, each deformable membrane being made in the second substrate, the detection means associated with the second chamber, the detection means associated with the third chamber, and the means for actuating the first deformable membrane all being positioned on a same upper surface of the second substrate.