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US 10,370,764 B2Granted
Isolator for a substrate processing chamber
AssigneeApplied Materials, Inc.
InventorRamprakash Sankarakrishnan
Life of this patent
Estimating the term…
Abstract
A processing kit for a plasma processing chamber. The processing kit includes a plurality of ceramic arc-shaped pieces. Each arc-shaped piece has a concave first end and a convex second end and the first end of each arc-shaped piece is configured to mate with an adjacent end of a neighboring arc-shaped piece to form a ring shaped inner isolator.
Claims17
A processing kit for a plasma processing chamber, comprising:
- a plurality of ceramic arc-shaped pieces, each arc-shaped piece having a concave first end and a convex second end, the first end of each arc-shaped piece configured to mate with an adjacent end of a neighboring arc-shaped piece with a gap between the first end of the arc-shaped piece and the adjacent end of the neighboring arc-shaped piece to form a ring shaped inner isolator, wherein the concave first end and the convex second end are configured to prevent line-of-sight across the gap.
A processing kit for a plasma processing chamber, comprising:
- a plurality of ceramic arc-shaped pieces, each arc-shaped piece having a concave first end and a convex second end, the first end of each arc-shaped piece configured to mate with an adjacent end of a neighboring arc-shaped piece with a gap between the first end of each arc-shaped piece and the adjacent end of each neighboring arc-shaped piece to form a ring shaped inner isolator, wherein the concave first end and the convex second end are configured to prevent line-of-sight across the gap;
- and
- a single piece ring shaped outer isolator that circumscribes the ring shaped inner isolator.
A processing kit for a plasma processing chamber, comprising:
- a plurality of ceramic arc-shaped pieces, each arc-shaped piece having a concave first end and a convex second end, the first end of each arc-shaped piece configured to mate with an adjacent end of a neighboring arc-shaped piece to form a ring shaped inner isolator when inner walls of the arc-shaped pieces are on a common diameter, the first end of each arc-shaped piece having gaps defined between adjacent ends are configured that prevent line-of-sight between the inner wall and an outer wall when the outer and inner walls of the arc-shaped pieces are on a common diameter, wherein each ceramic arc-shaped piece comprises:
- an inner wall having a radius of about 7.499 inches to about 7.501 inches;
- an outer wall having a radius of about 8.599 inches to about 8.601 inches;
- and
- a thickness of about 0.397 inches to about 0.403 inches.
2 more elements
Dependencies are inferred from the claim text.