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US 10,370,760 B2Granted
Methods for gas generation in a sealed gas cell cavity
AssigneeTexas Instruments Incorporated
InventorsSimon Joshua Jacobs, Juan Alejandro Herbsommer, Adam Joseph Fruehling
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Abstract
Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.
Claims18
A method of fabricating a gas cell, the method comprising:
- forming a cavity in a first side of a first substrate;
- forming a conductive material on at least one sidewall and a bottom of the cavity;
- providing a nonvolatile precursor material in the cavity of the first substrate, including placing a solid polymer precursor material in the cavity;
- after providing the nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first side of the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity;
- and
- activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.
3 more elements
Dependencies are inferred from the claim text.