Microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Matthias Friedrich Herrmann, Johannes Manz
Life of this patent
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Abstract
A microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device, wherein the microelectromechanical device may include: a substrate; a diaphragm mounted to the substrate; a first electrode mounted to the diaphragm; a second electrode mounted to the substrate; wherein the first electrode is laterally adjacent to the second electrode; and wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.
Claims19
A microelectromechanical device comprising:
- a substrate;
- a diaphragm mounted to the substrate;
- a first electrode mounted to the diaphragm, the first electrode comprising a plurality of first fingers having a cross-sectional height greater than a cross-sectional width both taken perpendicular to a longest dimension of a first finger of the plurality of first fingers;
- a second electrode mounted to the substrate, the second electrode comprising a plurality of second fingers having a cross-sectional height greater than a cross-sectional width both taken perpendicular to a longest dimension of a second finger of the plurality of second fingers;
- wherein the first electrode is laterally adjacent to the second electrode and the plurality of first fingers and the plurality of second fingers are interdigitated;
- and
- wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.
A microelectromechanical device comprising:
- a substrate;
- a diaphragm mounted to the substrate;
- a first electrode mounted to the diaphragm, the first electrode comprising a plurality of first fingers;
- a second electrode mounted to the substrate, the second electrode comprising a plurality of second fingers;
- wherein the first electrode is laterally adjacent to the second electrode and the plurality of first fingers and the plurality of second fingers are interdigitated;
- wherein the plurality of first fingers and the plurality of second fingers comprise:
- adjacent fingers having a first distance between each other and further adjacent fingers having a second distance between each other;
- wherein the first distance is different than the second distance;
- and
- wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.
A microelectromechanical device comprising:
- a substrate;
- a diaphragm mounted to the substrate;
- a first electrode mounted to the diaphragm, the first electrode comprising a plurality of first fingers;
- a second electrode mounted to the substrate, the second electrode comprising a plurality of second fingers;
- wherein the first electrode is laterally adjacent to the second electrode and the plurality of first fingers and the plurality of second fingers are interdigitated;
- wherein each finger of the plurality of first fingers and each finger of the plurality of second fingers is arranged radially with respect to a common vertical axis;
- and
- wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.
Dependencies are inferred from the claim text.