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US 10,369,787 B2Granted
Piezoelectric thin film, piezoelectric actuator, inkjet head, inkjet printer, and method for manufacturing piezoelectric actuator
AssigneeKonica Minolta, Inc.
InventorKenji Mawatari
Life of this patent
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Abstract
A piezoelectric thin film is formed by adding a donor element to lead zirconate titanate. In the piezoelectric thin film, a molar ratio of lead to a total sum of zirconium and titanium is 105% or higher, and, when positive and negative coercive electric fields in polarization and electric field hysteresis are referred to as Ec (+) and Ec (−), respectively, a value of |Ec (+) |/|Ec (−) | is 0.5 or more and 1.5 or less.
Claims19
A piezoelectric thin film obtained by adding a donor element to lead zirconate titanate, wherein a molar ratio of lead to a total sum of zirconium and titanium is 105% or higher, and
- wherein, when positive and negative coercive electric fields in polarization and electric field hysteresis are referred to as Ec (+) and Ec (−), respectively, a value of |Ec (+) |/|Ec (−) | is 0.5 or more and 1.5 or less;
- wherein the donor element is lanthanum,
- wherein a molar ratio of the lanthanum to the total sum of the zirconium and the titanium is 6% or more and 10% or less, and
- wherein a molar ratio of the zirconium to the total sum of the zirconium and the titanium is 54% or more and 59% or less.
1 more element
Dependencies are inferred from the claim text.