Laser process with controlled polarization

A method comprising:

• directing a laser beam of a laser system toward a substrate that is at least partially transparent to the laser beam, the laser system being configured to form laser-induced channels in the substrate, wherein the laser beam passes through a waveplate prior to impinging the substrate;
• forming the laser-induced channels in the substrate at a plurality of spaced apart locations along a process path, wherein an instantaneous direction of the process path relative to a direction of a crystalline plane of the substrate defines a process path angle, and wherein at least a portion of the process path is angled relative to the direction of the crystalline plane of the substrate;
• and
• selectively rotating at least one of the waveplate or the substrate to control a polarization angle of the laser beam to provide a desired characteristic of the laser-induced channels, wherein the at least one of the waveplate or the substrate is rotated to control the polarization angle based on (i) an instantaneous direction of polarization of the laser beam and (ii) the process path angle of the process path relative to the direction of the crystalline plane of the substrate.