Vibrator unit and target supply device
AssigneeGigaphoton Inc.
InventorToshiyuki Hirashita
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AssigneeGigaphoton Inc.
InventorToshiyuki Hirashita
Estimating the term…
A vibrator unit may be configured to vibrate a target material in a target channel and include a vibration element configured to vibrate in response to an external electrical signal having a predetermined frequency. A resonance frequency of the vibration element may be different from the predetermined frequency of the electrical signal. A vibrator unit may include a vibration transmission member in contact with the first member including the target channel in interior; and a vibration element that is in contact with the vibration transmission member. A mode-1 natural frequency of the vibration transmission member may be different from a resonance frequency of the vibration element.
A vibrator configured to vibrate a target material in a target channel, comprising:
A vibrator unit configured to vibrate a target material in a target channel, comprising:
Dependencies are inferred from the claim text.