Unit ultrasonic wave probe, ultrasonic wave probe module having same, and ultrasonic wave probe device having same

An ultrasonic probe device comprising:

• a first plurality of ultrasonic probes formed by stacking from a lowest ultrasonic probe among the first plurality of ultrasonic probes, each ultrasonic probe of the first plurality of ultrasonic probes comprising:
• a first flexible substrate having a wiring pattern thereon,
• a first piezoelectric wafer disposed on one side of an upper surface of the first flexible substrate, and electrically connected with the first flexible substrate, and
• a first block disposed on a lower surface of the first flexible substrate, wherein each first block of the first plurality of ultrasonic probes is stacked on an upper surface of a lower first flexible substrate of a lower ultrasonic probe disposed under the each block, except a first block of the lowest ultrasonic probe among the first plurality of ultrasonic probes;
• and
• a second plurality of ultrasonic probes formed by stacking from a lowest ultrasonic probe among the second plurality of ultrasonic probes, each ultrasonic probe of the second plurality of ultrasonic probes comprising:
• a second flexible substrate having a wiring pattern thereon,
• a second piezoelectric wafer disposed on one side of an upper surface of the second flexible substrate and electrically connected with the second flexible substrate, and
• a second block disposed on a lower surface of the second flexible substrate, wherein each second block of the second plurality of ultrasonic probes is stacked on an upper surface of an adjacent second flexible substrate of an adjacent ultrasonic probe disposed under the each second block, except a second block of the lowest ultrasonic probe among the second plurality of ultrasonic probes,
• wherein one end of stacked first blocks of the first plurality of ultrasonic probes is formed in a staircase shape and other end, opposite the one end, of the stacked first blocks are aligned,
• wherein one end of stacked second blocks of the second plurality of ultrasonic probes is formed in a staircase shape and other end, opposite the one end, of the stacked second blocks are aligned, and
• wherein the first and second plurality of ultrasonic probes are disposed side by side each other.