Device and method for forming same
AssigneeHitachi, Ltd.
InventorsItaru Yanagi, Kenichi Takeda
Life of this patent
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Abstract
The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.
Claims13
A method for forming a biomolecular structure analysis device comprising forming a nanopore sequencing membrane by forming a first film on a surface of a substrate, wherein the surface is Si,
- then forming a hole in the first film in such a manner that the surface of the substrate is exposed,
- then forming a second film thinner than 5 nm on the first film and on the surface of the substrate and then etching the substrate with a solution which does not remove the second film.
A biomolecular structure analysis device comprising a nanopore sequencing membrane supported with a substrate wherein:
- the surface of the substrate is Si,
- the membrane has a structure in which the substrate is not right under the membrane,
- the membrane is formed with a film of at least two layers or more,
- a part of the membrane has a thin film membrane region formed with a first film,
- the thin film membrane region is surrounded by a second film which is thicker than the first film,
- the first film is formed also on a wall of the second film,
- the first film is thinner than 5 nm, and
- the substrate is located right under a part of the second film which is outside the membrane.
Dependencies are inferred from the claim text.