Device and method for exhaust gas treatment on CVD reactor

A method for operating a system, the system comprising (i) a reactor with an exhaust gas line, (ii) a first exhaust gas device with a first treatment member, (iii) a first check valve for controlling whether an exhaust gas flows from the exhaust gas line into the first exhaust gas device, (iv) a second exhaust gas device with a second treatment member, (v) a second check valve for controlling whether the exhaust gas flows from the exhaust gas line into the second exhaust gas device, (vi) a first gas feed device configured to feed a first equalizing gas into a gas conduit disposed between the first exhaust gas device and the first check valve, and (vii) a second gas feed device configured to feed a second equalizing gas into a gas conduit disposed between the second exhaust gas device and the second check valve, the method comprising:

• performing a first process step during which the exhaust gas flows from the exhaust gas line through the first check valve and into the first exhaust gas device;
• at a beginning of a switching phase that switches from the first process step to a second process step, setting a mass flow of the second equalizing gas equal to a value that corresponds to a mass flow that is flowing through the first exhaust gas device so as to equalize a total pressure in the first exhaust gas device and a total pressure in the second exhaust gas device;
• as soon as the total pressure in the first exhaust gas device equals the total pressure in the second exhaust gas device, opening the second check valve, causing the first exhaust gas device and the second exhaust gas device to both be fluidly coupled to the exhaust gas line, wherein by flowing the second equalizing gas through the second exhaust gas device, the exhaust gas is prevented from flowing into the second exhaust gas device while the first exhaust gas device and the second exhaust gas device are both fluidly coupled to the exhaust gas line;
• and
• after the opening of the second check valve, closing the first check valve and reducing the mass flow of the second equalizing gas, thereby directing the exhaust gas to flow from the exhaust gas line through the second check valve and into the second exhaust gas device.