US 10,320,362 B2 · Elastic wave device

Abstract

An elastic wave device includes a multilayer film provided on a support substrate and including a piezoelectric thin film and a layer other than the piezoelectric thin film, an interdigital transducer electrode provided on one surface of the piezoelectric thin film, and an external connection terminal electrically connected to the interdigital transducer electrode. In a plan view, the multilayer film is partially absent or omitted in a region outside a region where the interdigital transducer electrode is provided, and the elastic wave device further includes a first insulating layer provided on the support substrate in at least a portion of a region where the multilayer film is absent or omitted.

Claims23

Dependent claims

An elastic wave device comprising:

a support substrate;
a multilayer film provided on the support substrate and including a piezoelectric thin film;
an interdigital transducer electrode provided on a surface of the piezoelectric thin film;
an electrode pad electrically connected to the interdigital transducer electrode;
and
a first insulating layer provided on the support substrate in a region outside the multilayer film in a plan view in a direction of thickness of the support substrate, and located below the electrode pad.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/171,181Filed 2 Jun 2016 · continuation

Priority

JP 2013-27256627 Dec 2013

Published

US 2016/0277003 A122 Sep 2016

Granted

11 Jun 2019

Term ends

Not estimatedThe source records don’t support an estimate.

Classification9 codes

H03H 9/058
Holders or supports: for surface acoustic wave devices
H03H 3/08
For the manufacture of electromechanical resonators or networks: for the manufacture of resonators or networks using surface acoustic waves
H03H 9/1071
For surface acoustic wave [SAW] devices: the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical…
H03H 9/14541
Formation: multilayer finger or busbar electrode

Elastic wave device

Life of this patent

Elastic wave device

Life of this patent

Abstract

Claims23