Back to results
US 10,319,863 B2Granted
Semiconductor device having a varying thickness nanowire channel and method for fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSeung Hun Lee, Dong Woo Kim, Dong Chan Suh, Sun Jung Kim
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a drain, a source, a gate electrode, and a nanowire between the source and drain. The nanowire has a first section with a first thickness and a second section with a second thickness greater than the first thickness. The second section is between the first section and at least one of the source or drain. The first nanowire includes a channel when a voltage is applied to the gate electrode.
Claims17
A transistor, comprising:
- a drain;
- a source;
- a gate electrode;
- a first nanowire between the source and drain;
- and
- a gate spacer formed on opposite sidewalls of the gate electrode, wherein
- the gate spacer includes a hole therein,
- the first nanowire extends through the hole in the gate spacer to contact the source and drain,
- the first nanowire has a first section with a first thickness and a second section with a second thickness different from the first thickness, wherein the second section is between the first section and at least one of the source or drain, the first nanowire to include a channel when a voltage is applied to the gate electrode,
- the gate electrode surrounds a periphery of the first section, and
- the gate spacer surrounds a periphery of the second section.
8 more elements
Dependencies are inferred from the claim text.