Back to results
US 10,319,816 B2Granted
Silicon germanium fin channel formation
AssigneesInternational Business Machines Corporation, STMicroelectronics S.r.l.
InventorsHong He, Nicolas Loubet, Junli Wang
Life of this patent
Estimating the term…
Abstract
A fin field effect transistor includes a Si fin including a central portion between end portions of the fin, and a SiGe channel region disposed on the central portion of the fin. The SiGe channel region includes a facet free SiGe region having Ge atoms diffused into the Si fin and includes a same shape as the Si fin outside the central portion.
Claims20
A fin field effect transistor, comprising:
- a Si fin including a central portion between end portions of the fin;
- and
- a SiGe channel region disposed on the central portion of the fin, the SiGe channel region including a facet free SiGe region having Ge atoms diffused into the Si fin and including a same shape as the Si fin outside the central portion.
A fin field effect transistor, comprising:
- a Si fin including a central portion between end portions of the fin;
- a SiGe channel region disposed on the central portion of the fin, the SiGe channel region including a facet free SiGe region having Ge atoms diffused into the Si fin and including a same shape as the Si fin outside the central portion;
- and
- source and drain regions formed on or in the fin on opposite sides of the SiGe channel region, wherein the SiGe channel region extends vertically from a top of the fin to a bottom of the fin.
1 more element
A fin field effect transistor, comprising:
- a Si fin including a central portion between end portions of the fin;
- a gate structure formed over the central portion of the fin;
- and
- a SiGe channel region disposed on the central portion of the fin corresponding to the gate structure, the SiGe channel region including a facet free SiGe region having Ge atoms diffused into the Si fin and including a same shape as the Si fin outside the central portion.
1 more element
Dependencies are inferred from the claim text.