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US 10,319,769 B2Granted
Solid-state imaging device and electronic apparatus
AssigneeSony Corporation
InventorHiromi Okazaki
Life of this patent
Estimating the term…
Abstract
A solid-state imaging device includes a semiconductor layer on which a plurality of pixels are arranged along a light-receiving surface being a main surface of the semiconductor layer, photoelectric conversion units provided for the respective pixels in the semiconductor layer, and a trench element isolation area formed by providing an insulating layer in a trench pattern formed on a light-receiving surface side of the semiconductor layer, the trench element isolation area being provided at a position displaced from a pixel boundary between the pixels.
Claims30
An imaging device, comprising:
- a semiconductor substrate having a first side as a light incident side and a second side opposite to the first side, the first side and the second side each extending in a first direction;
- a plurality of photoelectric conversion units disposed in the semiconductor substrate;
- a first trench region disposed in the semiconductor substrate between two of the plurality of photoelectric conversion units in the first direction;
- a first metal region disposed adjacent to the first side such that the first metal region is above at least a part of the first trench region in a second direction, the second direction being perpendicular to the first direction;
- a second trench region disposed in the semiconductor substrate adjacent to at least one of the plurality of photoelectric conversion units in the first direction;
- a second metal region disposed adjacent to the first side such that the second metal region is above at least a part of the second trench region in the second direction;
- a first opening of the first trench corresponding to a first color filter;
- and
- a second opening of the second trench corresponding to a second color filter;
- wherein the first trench region and the second trench region are offset in opposite directions from a boundary between the first color filter and the second color filter and the first metal region is offset from a center portion of the first trench region in an opposite direction than the second metal region is offset from a center portion of the second trench region,
- wherein a size of the first opening and a size of the second opening are substantially the same, and
- wherein a color of the first color filter is different from a color of the second color filter.
9 more elements
An electronic apparatus, comprising:
- an imaging device, comprising:
- a semiconductor substrate having a first side as a light incident side and a second side opposite to the first side, the first side and the second side each extending in a first direction;
- a plurality of photoelectric conversion units disposed in the semiconductor substrate;
- a first trench region disposed in the semiconductor substrate between two of the plurality of photoelectric conversion units in the first direction;
- a first metal region disposed adjacent to the first side such that the first metal region is above at least a part of the first trench region in a second direction, the second direction being perpendicular to the first direction;
- a second trench region disposed in the semiconductor substrate adjacent to at least one of the plurality of photoelectric conversion units in the first direction;
- a second metal region disposed adjacent to the first side of the semiconductor substrate such that the second metal region is above at least a part of the second trench region in the second direction;
- a first opening of the first trench corresponding to a first color filter;
- and
- a second opening of the second trench corresponding to a second color filter;
- wherein the first trench region and the second trench region are offset in opposite directions from a boundary between the first color filter and the second color filter and the first metal region is offset from a center portion of the first trench region in an opposite direction than the second metal region is offset from a center portion of the second trench region,
- wherein a size of the first opening and a size of the second opening are substantially the same, and
- wherein a color of the first color filter is different from a color of the second color filter.
10 more elements
Dependencies are inferred from the claim text.