Solderless interconnection structure and method of forming same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Wei Lin, Sheng-Yu Wu, Yu-Jen Tseng, Tin-Hao Kuo, Chen-Shien Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Wei Lin, Sheng-Yu Wu, Yu-Jen Tseng, Tin-Hao Kuo, Chen-Shien Chen
Estimating the term…
An embodiment bump on trace (BOT) structure includes a contact element supported by an integrated circuit, an under bump metallurgy (UBM) feature electrically coupled to the contact element, a metal ladder bump mounted on the under bump metallurgy feature, the metal ladder bump having a first tapering profile, and a substrate trace mounted on a substrate, the substrate trace having a second tapering profile and coupled to the metal ladder bump through direct metal-to-metal bonding. An embodiment chip-to-chip structure may be fabricated in a similar fashion.
A method of forming semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.