Fabrication of vertical fuses from vertical fins
AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, James J. Demarest, Juntao Li
Life of this patent
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Abstract
A vertical fuse element, including, a conductive silicide base on a surface of a substrate, and a conductive silicide pillar extending in a direction perpendicular to the surface of the substrate, where the conductive silicide pillar is on the conductive silicide base, and wherein the conductive silicide pillar includes an upper portion having a width, W5, a base having a width, W6, and a neck region having a width, W7, where W7<W5, and W7≤W6.
Claims20
An array of vertical fuse elements, comprising:
- a first conductive silicide base segment and a second conductive silicide base segment on a surface of a substrate;
- and
- a plurality of conductive silicide pillars extending in a direction perpendicular to the surface of the substrate, wherein at least one of the plurality of conductive silicide pillars is on the first conductive silicide base segment and at least one of the plurality of conductive silicide pillars is on the second conductive silicide base segment, and wherein each of the plurality of conductive silicide pillars includes an upper portion having a width, W5, a base having a width, W6, and a neck region having a width, W7, where W7<W5, and W7<W6.
A method of forming an array of vertical fuse elements on a first region of a substrate adjacent to a second region of the substrate having fin field effect transistors, comprising:
- forming a plurality of vertical fins on the substrate;
- forming a fin cap on each of the plurality of vertical fins, where each of the fin caps covers an upper portion of one of the plurality of vertical fins and leaves a lower portion of the vertical fin exposed;
- reducing the width of the lower portion of each of the vertical fins to form a neck region between the upper portion and the lower portion of the vertical fin;
- removing the fin cap from each of the plurality of vertical fins;
- forming an amalgamation layer on the plurality of vertical fins;
- and
- heat treating the amalgamation layer and plurality of vertical fins to form conductive silicide pillars from the plurality of vertical fins, and a conductive silicide base from a surface region of the substrate.
A method of forming a vertical fuse element, comprising:
- forming a plurality of vertical fins on a substrate;
- forming a neck region in each of a first subset of vertical fins on a first region of the substrate, wherein the neck region is between an upper portion and a lower portion of the vertical fin, and wherein a second subset of vertical fins on a second region of the substrate remains without a neck region.
Dependencies are inferred from the claim text.