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US 10,319,637 B2Granted
Method for fully self-aligned via formation using a directed self assembly (DSA) process
AssigneeTokyo Electron Limited
InventorsNihar Mohanty, Elliott Franke, Richard Farrell
Life of this patent
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Abstract
A formed back-end-of-line (BEOL) metal line layer may include a plurality of metal lines with dielectric oxide caps that are disposed in between each metal lines. To overlay an interconnecting layer of metal lines on a selected metal line of the BEOL metal line layer, a block copolymer (BCP) may be formed on a patterning layer. Thereafter, a selective etching of the formed BCP creates a recess above the selected metal line. The created recess facilitates the overlaying of the interconnecting layer of metal lines.
Claims21
A method of self-aligned via formation comprising:
- depositing a guide pattern layer on a first layer that includes an alternating dielectric oxide caps and metal lines;
- performing an etching process on the deposited guide pattern layer to expose a surface of the metal line and a portion of dielectric oxide caps adjacent to the surface of the metal line, the performing the etching process resulting in a guide pattern;
- depositing a block copolymer (BCP) on the exposed surface of the metal line and the portion of the adjacent dielectric oxide caps;
- annealing the deposited BCP to graft a first polymer and a second polymer on the exposed surface of the metal line and the portion of the adjacent dielectric oxide caps, respectively;
- recessing the first polymer and the second polymer until uncovering a top surface of the guide pattern, wherein the recessing the first polymer and the second polymer is executed after annealing the deposited BCP;
- etching the grafted first polymer on the exposed surface of the metal line after recessing the first polymer and the second polymer;
- and
- forming a second layer of metal lines that interconnects with the exposed surface of the metal line.
5 more elements
A device comprising:
- a back-end-of-line (BEOL) metal line layer that includes alternating dielectric oxide caps and metal lines;
- a guide pattern formed on the BEOL metal line layer, wherein the guide pattern is etched to expose a surface of the metal line and a portion of dielectric oxide caps adjacent to the surface of the metal line;
- a block copolymer (BCP) that is formed on the exposed surface of the metal line and the portion of the adjacent dielectric oxide caps, the BCP is annealed to graft a first polymer and a second polymer on the exposed surface of the metal line and the portion of the adjacent dielectric oxide caps, respectively, wherein the grafted first polymer is selectively etched to form an opening above the exposed surface of the metal line;
- an interconnecting layer of metal lines that is formed on the opening above the exposed surface of the metal line.
1 more element
A method of processing a substrate, the method comprising:
- depositing a guide pattern layer on a back-end-of-line (BEOL) metal line layer that includes an alternating dielectric oxide caps and metal lines;
- performing an etching process on the deposited guide pattern layer to expose a surface of the metal lines and a portion of dielectric oxide caps adjacent to the surface of the metal line of the BEOL metal line layer, the performing the etching process resulting in a guide pattern, wherein the performing of the etching process on the guide pattern forms an initial isolation of the metal lines that are selected to interconnect with an interconnecting layer of metal lines;
- forming a block copolymer (BCP) on the exposed surface of the metal line and the portion of the adjacent dielectric oxide caps;
- annealing the formed BCP to graft a first polymer and a second polymer on the exposed surface of the metal line and the portion of the adjacent dielectric oxide caps, respectively;
- etching the grafted first polymer on the exposed surface of the metal line;
- and
- forming the interconnecting layer of metal lines that interconnects with the exposed surface of the metal line of the BEOL metal line layer.
4 more elements
Dependencies are inferred from the claim text.