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US 10,319,623 B2Granted
Conveyance hand, conveyance apparatus, lithography apparatus, manufacturing method of article, and holding mechanism
AssigneeCanon Kabushiki Kaisha
InventorYasunao Matsuhira
Life of this patent
Estimating the term…
Abstract
A conveyance hand for holding a conveyed object can include a base, a pad configured to suction the conveyed object, and a first support member fixed to the base and configured to support the pad. First support member can include three or more support members each configured to support the pad.
Claims20
A conveyance hand for holding a conveyed object, the conveyance hand comprising:
- a base;
- a pad configured to suction the conveyed object;
- and
- a support member disposed on the base and configured to support the pad,
- wherein the support member is configured to support the pad by three or more support portions configured to deform elastically respectively to tilt the pad in respective directions different from each other, and
- wherein the three or more support portions are configured to deform so that the pad conforms to a shape of the conveyed object disposed on the pad.
3 more elements
A conveyance apparatus for conveying a conveyed object, the apparatus comprising:
- a conveyance hand configured to hold the conveyed object;
- an arm portion configured to support the conveyance hand;
- and
- a driving unit configured to drive the arm portion,
- wherein the conveyance hand includes:
- a base;
- a pad configured to suction the conveyed object;
- and
- a support member disposed on the base and configured to support the pad,
- wherein the support member is configured to support the pad by three or more support portions configured to deform elastically respectively to tilt the pad in respective directions different from each other, and
- wherein the three or more support portions are configured to deform so that the pad conforms to a shape of the conveyed object disposed on the pad.
8 more elements
A lithography apparatus for forming a pattern on a substrate, the apparatus comprising:
- a holding unit configured to hold the substrate;
- and
- a conveyance apparatus configured to convey the substrate as a conveyed object to the holding unit,
- wherein the conveyance apparatus includes:
- a conveyance hand configured to hold the conveyed object;
- an arm portion configured to support the conveyance hand;
- and
- a driving unit configured to drive the arm portion, and
- the conveyance hand includes:
- a base;
- a pad configured to suction the conveyed object;
- and
- a support member disposed on the base and configured to support the pad,
- wherein the support member is configured to support the pad by three or more support portions configured to deform elastically respectively to tilt the pad in respective directions different from each other, and
- wherein the three or more support portions are configured to deform so that the pad conforms to a shape of the conveyed object disposed on the pad.
12 more elements
A method of manufacturing an article, the method comprising:
- forming a pattern on a substrate by using a lithography apparatus;
- processing the substrate after the pattern is formed thereon;
- and
- manufacturing the article from the processed substrate,
- wherein the lithography apparatus includes:
- a holding unit configured to hold the substrate;
- and
- a conveyance apparatus configured to convey the substrate as a conveyed object to the holding unit, and
- the conveyance apparatus includes:
- a conveyance hand configured to hold the conveyed object;
- an arm portion configured to support the conveyance hand;
- and
- a driving unit configured to drive the arm portion, and
- the conveyance hand includes:
- a base;
- a pad configured to suction the conveyed object;
- and
- a support member disposed on the base and configured to support the pad,
- wherein the support member is configured to support the pad by three or more support portions configured to deform elastically respectively to tilt the pad in respective directions different from each other, and
- wherein the three or more support portions are configured to deform so that the pad conforms to a shape of the conveyed object disposed on the pad.
17 more elements
A holding mechanism, to be used in a conveyance hand, for holding a conveyed object, the mechanism comprising:
- a pad configured to suction the conveyed object;
- and
- a support member disposed on a base and configured to support the pad,
- wherein the support member is configured to support the pad by three or more support portions configured to deform elastically respectively to tilt the pad in respective directions different from each other, and
- wherein the three or more support portions are configured to deform so that the pad conforms to a shape of the conveyed object disposed on the pad.
2 more elements
Dependencies are inferred from the claim text.