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US 10,319,579 B2Granted
Adapter for replaceable lamp
AssigneeApplied Materials, Inc.
InventorsJoseph M. Ranish, Oleg V. Serebryanov
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal coupling to the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
Claims20
A lamp assembly, comprising:
- a lamp element comprising a first engagement feature;
- a first conductive lead extending from the lamp element;
- a second conductive lead extending from the lamp element;
- an adapter comprising a second engagement feature operable to engage or disengage with the first engagement feature, the adapter having a receptacle contoured to receive a portion of the lamp element, the adapter having:
- a first channel extending through the adapter and sized to allow the first conductive lead to pass through the first channel;
- and
- a second channel extending through the adapter and sized to allow the second conductive lead to pass through the second channel;
- and
- a first insulative sleeve having a first end attached to the first conductive lead and a second end attached to a first conductive pin, the first insulative sleeve extending through the first channel and having a first metallic trace deposited along a first side of an inner surface of the first insulative sleeve.
6 more elements
A lamp assembly, comprising:
- a lamp element comprising a first engagement feature;
- a first conductive lead extending from the lamp element;
- a second conductive lead extending from the lamp element;
- an adapter comprising a second engagement feature operable to engage or disengage with the first engagement feature, the adapter having a receptacle contoured to receive a portion of the lamp element, the adapter having:
- a first channel extending through the adapter and sized to allow the first conductive lead to pass through the first channel;
- and
- a second channel extending through the adapter and sized to allow the second conductive lead to pass through the second channel;
- a first conductive pin coupled to the first conductive lead, the first conductive pin extending through the first channel;
- an insulative sleeve having a first end attached to the second conductive lead and a second end attached to a second conductive pin, the insulative sleeve extending through the second channel;
- and
- a wire fuse disposed within the second channel, the wire fuse connecting the second conductive lead to the second conductive pin.
8 more elements
A processing chamber, comprising:
- a housing enclosing a process zone;
- a substrate support disposed within the process zone;
- and
- a lamp assembly, comprising:
- a plurality of lamp elements, each comprising a first engagement feature;
- a first conductive lead extending from the lamp element;
- a second conductive lead extending from the lamp element;
- an adapter comprising a second engagement feature operable to engage or disengage with the first engagement feature, the adapter having a receptacle contoured to receive a portion of the lamp element, the adapter having:
- a first channel extending through the adapter and sized to allow the first conductive lead to pass through the first channel;
- and
- a second channel extending through the adapter and sized to allow the second conductive lead to pass through the second channel;
- a first conductive pin coupled to the first conductive lead, the first conductive pin extending through the first channel;
- an insulative sleeve having a first end attached to the second conductive lead and a second end attached to a second conductive pin, the insulative sleeve extending through the second channel;
- and
- a wire fuse disposed within the second channel and connecting the second conductive lead to the second conductive pin.
12 more elements
Dependencies are inferred from the claim text.