Plasma processing apparatus for performing plasma process for target object

A plasma processing apparatus for performing a plasma process for a target object, comprising:

• a process chamber including a sidewall having a transfer port for loading and unloading the target object;
• a mounting table disposed in the process chamber;
• a shield member disposed along an inner surface of the sidewall to surround the mounting table, the shield member including an opening which faces the transfer port and a bottom portion which defines a bottom of the opening;
• and
• a shutter which is movable up and down between an open position and a closed position, wherein in the closed position the shutter closes the opening, and
• wherein:
• the shutter includes:
• (i) a first portion which faces the opening and closes the opening in the closed position, and
• (ii) a second portion which faces a lower side of the bottom portion of the shield member, wherein the shutter includes a contactor having a nickel-based alloy surface, and the contactor is located at the second portion of the shutter,
• the shield member further includes a nickel-based alloy contact surface which faces the second portion of the shutter,
• the nickel-based alloy contact surface of the shield member and the nickel-based alloy surface of the contactor of the shutter contact each other when the shutter is in the closed position,
• the first portion of the shutter includes a surface which is formed of a material which is different from the nickel-based alloy surface of the contactor,
• wherein the shield member includes an aluminum portion and a nickel-based alloy portion provided below the aluminum portion at the lower side of the bottom portion of the shield member,
• wherein the nickel-based alloy portion provides the nickel alloy contact surface of the shield member,
• wherein the shutter includes a first groove on the second portion,
• wherein the contactor is an elastic member fitted in the first groove and having a nickel-based alloy surface to provide the nickel-based alloy surface of the contactor of the shutter, and
• wherein the aluminum portion includes a second groove and the nickel-based alloy portion comprises a block of nickel-based alloy material fitted into the second groove.