Method of determining crystallographic properties of a sample and electron beam microscope for performing the method

A method of determining at least one crystallographic property of a sample, the method comprising:

• generating a first electron beam of electrons having a first mean kinetic energy to be irradiated on the sample;
• detecting, for each of first locations of a region of the sample, a two-dimensional spatial distribution of electrons transmitting through the sample and being incident onto a detection area while directing the first electron beam onto the first locations;
• generating, for each of the first locations, first data representing the two-dimensional spatial distribution;
• generating a second electron beam of electrons to be irradiated on the sample, the second electron beam having a second mean kinetic energy different from the first mean kinetic energy;
• detecting, for each of second locations of the region of the sample, a two-dimensional spatial distribution of electrons transmitting through the sample and being incident onto the detection area while directing the second electron beam onto the second locations;
• generating, for each of the second locations, second data representing the two-dimensional spatial distribution;
• and
• generating an image of the sample,
• wherein:
• the image comprises:
• a) first pixels corresponding to first target locations of the sample;
• and b) second pixels corresponding to second target locations of the sample;
• the second target locations are different from the first target locations;
• values at the first pixels represent the at least one crystallographic property and are calculated based on the first data;
• and
• values at the second pixels represent the at least one crystallographic property and are calculated based on the second data.