OLED display device and manufacture method thereof

A manufacture method of an OLED display device, comprising steps of:

• step 1, providing a substrate, and forming a pixel definition layer on the substrate, and configuring a plurality of through holes which are separately located in the pixel definition layer, and the plurality of through holes defining a plurality of red pixel regions, a plurality of green pixel regions and a plurality of blue pixel regions on the substrate;
• respectively forming a first transparent conductive metal oxide layer, a third transparent conductive metal oxide layer, a fifth transparent conductive metal oxide layer in the red pixel region, the green pixel region and the blue pixel region of the substrate;
• respectively forming a first metal layer, a second metal layer, a third metal layer on the first transparent conductive metal oxide layer, the third transparent conductive metal oxide layer, the fifth transparent conductive metal oxide layer;
• respectively coating PEDOT:PSS (Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate)) aqueous solution on the first metal layer, the second metal layer and the third metal layer, and forming a first PEDOT:PSS conductive film layer, a second PEDOT:PSS conductive film layer, a third PEDOT:PSS conductive film layer after curing and removing moisture;
• respectively depositing a second transparent conductive metal oxide layer, a fourth transparent conductive metal oxide layer, a sixth transparent conductive metal oxide layer on the first PEDOT:PSS conductive film layer, the second PEDOT:PSS conductive film layer, the third PEDOT:PSS conductive film layer;
• in the red pixel region, the first transparent conductive metal oxide layer, the first metal layer, the first PEDOT:PSS conductive film layer and the second transparent conductive metal oxide layer which are stacked up from bottom to top in order constituting a first anode, together;
• in the green pixel region, the third transparent conductive metal oxide layer, the second metal layer, the second PEDOT:PSS conductive film layer and the fourth transparent conductive metal oxide layer which are stacked up from bottom to top in order constituting a second anode, together;
• in the blue pixel region, the fifth transparent conductive metal oxide layer, the third metal layer, the third PEDOT:PSS conductive film layer and the sixth transparent conductive metal oxide layer which are stacked up from bottom to top in order constituting a third anode, together;
• step 2, cleaning the first anode, the second anode and the third anode;
• step 3, respectively evaporating a first hole injection layer, a second hole injection layer, a third hole injection layer on the first anode, the second anode and the third anode in the same evaporation process;
• respectively evaporating a first hole transporting layer, a second hole transporting layer, a third hole transporting layer on the first hole injection layer, the second hole injection layer, the third hole injection layer in the same evaporation process;
• respectively evaporating a red light emitting layer, a green light emitting layer, a blue light emitting layer on the first hole transporting layer, the second hole transporting layer, the third hole transporting layer in three different evaporation processes;
• respectively evaporating a first electron transporting layer, a second electron transporting layer, a third electron transporting layer on the red light emitting layer, the green light emitting layer, the blue light emitting layer in the same evaporation process;
• respectively evaporating a first cathode, a second cathode, a third cathode on the first electron transporting layer, the second electron transporting layer, the third electron transporting layer in the same evaporation process;
• and forming red OLED elements, green OLED elements and blue OLED elements respectively corresponding to the red pixel regions, the green pixel regions, the blue pixel regions in the plurality of through holes of the pixel definition layer;
• wherein materials of the first PEDOT:PSS conductive film layer, the second PEDOT:PSS conductive film layer, the third PEDOT:PSS conductive film layer are the same, and a refractive index thereof is ηP, and materials of the second transparent conductive metal oxide layer, the fourth transparent conductive metal oxide layer, the sixth transparent conductive metal oxide layer are the same, and a refractive index thereof is ηI, and materials of the first hole injection layer, the second hole injection layer, the third hole injection layer are the same, and a refractive index thereof is ηJ, and materials of the first hole transporting layer, the second hole transporting layer, the third hole transporting layer are the same, and a refractive index thereof is ηT, and a peak wavelength of red light emitted by the red light emitting layer is λR, and a peak wavelength of green light emitted by the green light emitting layer is λG, and a peak wavelength of blue light emitted by the blue light emitting layer is λB;
• a thickness of the first PEDOT:PSS conductive film layer is defined to be dRP, and a thickness of the second transparent conductive metal oxide layer is defined to be dRI, and a thickness of the first hole injection layer is defined to be dRJ, and a thickness of the first hole transporting layer is defined to be dRT, and a relation of dRP, dRI, dRJ, dRT satisfies a relationship:
• ηP*dRP+ηI*dRI+ηJ*dRJ+ηT*dRT=(2mR+1)λR/4;
• wherein mR is a natural number;
• a thickness of the second PEDOT:PSS conductive film layer is defined to be dGP, and a thickness of the fourth transparent conductive metal oxide layer is defined to be dGI, and a thickness of the second hole injection layer is defined to be dGJ, and a thickness of the second hole transporting layer is defined to be dGT, and a relation of dGP, dGI, dGT satisfies a relationship:
• ηP*dGP+ηI*dGI+ηGJ*dGJ+ηT*dGT+(2mG+1)λG/4;
• wherein mG is a natural number;
• a thickness of the third PEDOT:PSS conductive film layer is defined to be dBP, and a thickness of the sixth transparent conductive metal oxide layer is defined to be dBI, and a thickness of the third hole injection layer is defined to be dBJ, and a thickness of the third hole transporting layer is defined to be dBT, and a relation of dBP, dBI, dBJ, dBT satisfies a relationship:
• ηP*dBP+ηI*dBI+ηJ*dBJ+ηT*dBT=(2mB+1)λB/4;
• wherein mB is a natural number;
• and dRI=dGI=dBI, dRJ=dGJ=dBJ, dRT=dGT=dBT, mR=mG=mB, and λR, λG, λB are unequal, and thus, dRP, dGP, dBP are unequal.

A manufacture method of an OLED display device, comprising steps of:

• step 1, providing a substrate, and forming a pixel definition layer on the substrate, and configuring a plurality of through holes which are separately located in the pixel definition layer, and the plurality of through holes defining a plurality of red pixel regions, a plurality of green pixel regions and a plurality of blue pixel regions on the substrate;
• respectively forming a first transparent conductive metal oxide layer, a third transparent conductive metal oxide layer, a fifth transparent conductive metal oxide layer in the red pixel region, the green pixel region and the blue pixel region of the substrate;
• respectively forming a first metal layer, a second metal layer, a third metal layer on the first transparent conductive metal oxide layer, the third transparent conductive metal oxide layer, the fifth transparent conductive metal oxide layer;
• respectively coating PEDOT:PSS (Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate)) aqueous solution on the first metal layer, the second metal layer and the third metal layer, and forming a first PEDOT:PSS conductive film layer, a second PEDOT:PSS conductive film layer, a third PEDOT:PSS conductive film layer after curing and removing moisture;
• respectively depositing a second transparent conductive metal oxide layer, a fourth transparent conductive metal oxide layer, a sixth transparent conductive metal oxide layer on the first PEDOT:PSS conductive film layer, the second PEDOT:PSS conductive film layer, the third PEDOT:PSS conductive film layer;
• in the red pixel region, the first transparent conductive metal oxide layer, the first metal layer, the first PEDOT:PSS conductive film layer and the second transparent conductive metal oxide layer which are stacked up from bottom to top in order constituting a first anode, together;
• in the green pixel region, the third transparent conductive metal oxide layer, the second metal layer, the second PEDOT:PSS conductive film layer and the fourth transparent conductive metal oxide layer which are stacked up from bottom to top in order constituting a second anode, together;
• in the blue pixel region, the fifth transparent conductive metal oxide layer, the third metal layer, the third PEDOT:PSS conductive film layer and the sixth transparent conductive metal oxide layer which are stacked up from bottom to top in order constituting a third anode, together;
• step 2, cleaning the first anode, the second anode and the third anode;
• step 3, respectively evaporating a first hole injection layer, a second hole injection layer, a third hole injection layer on the first anode, the second anode and the third anode in the same evaporation process;
• respectively evaporating a first hole transporting layer, a second hole transporting layer, a third hole transporting layer on the first hole injection layer, the second hole injection layer, the third hole injection layer in the same evaporation process;
• respectively evaporating a red light emitting layer, a green light emitting layer, a blue light emitting layer on the first hole transporting layer, the second hole transporting layer, the third hole transporting layer in three different evaporation processes;
• respectively evaporating a first electron transporting layer, a second electron transporting layer, a third electron transporting layer on the red light emitting layer, the green light emitting layer, the blue light emitting layer in the same evaporation process;
• respectively evaporating a first cathode, a second cathode, a third cathode on the first electron transporting layer, the second electron transporting layer, the third electron transporting layer in the same evaporation process;
• and forming red OLED elements, green OLED elements and blue OLED elements respectively corresponding to the red pixel regions, the green pixel regions, the blue pixel regions in the plurality of through holes of the pixel definition layer;
• wherein materials of the first PEDOT:PSS conductive film layer, the second PEDOT:PSS conductive film layer, the third PEDOT:PSS conductive film layer are the same, and a refractive index thereof is ηP, and materials of the second transparent conductive metal oxide layer, the fourth transparent conductive metal oxide layer, the sixth transparent conductive metal oxide layer are the same, and a refractive index thereof is ηI, and materials of the first hole injection layer, the second hole injection layer, the third hole injection layer are the same, and a refractive index thereof is ηJ, and materials of the first hole transporting layer, the second hole transporting layer, the third hole transporting layer are the same, and a refractive index thereof is ηT, and a peak wavelength of red light emitted by the red light emitting layer is λR, and a peak wavelength of green light emitted by the green light emitting layer is λG, and a peak wavelength of blue light emitted by the blue light emitting layer is λB;
• a thickness of the first PEDOT:PSS conductive film layer is defined to be dRP, and a thickness of the second transparent conductive metal oxide layer is defined to be dRI, and a thickness of the first hole injection layer is defined to be dRJ, and a thickness of the first hole transporting layer is defined to be dRT, and a relation of dRP, dRI, dRJ, dRT satisfies a relationship:
• ηRP*dRP+ηRI*dRI+ηJ*dRJ+ηT*dRT=(2mR+1)λR/4;
• wherein mR is a natural number;
• a thickness of the second PEDOT:PSS conductive film layer is defined to be dGP, and a thickness of the fourth transparent conductive metal oxide layer is defined to be dGI, and a thickness of the second hole injection layer is defined to be dGJ, and a thickness of the second hole transporting layer is defined to be dGT, and a relation of dGP, dGI, dGJ, dGT satisfies a relationship:
• ηP*dGP+ηI*dGI+ηJ*dGJ+ηT*dGT=(2mG+1)λG/4;
• wherein mG is a natural number;
• a thickness of the third PEDOT:PSS conductive film layer is defined to be dBP, and a thickness of the sixth transparent conductive metal oxide layer is defined to be dBI, and a thickness of the third hole injection layer is defined to be dBJ, and a thickness of the third hole transporting layer is defined to be dBT, and a relation of dBP, dBI, dBJ, dBT satisfies a relationship:
• ηP*dBP+ηI*dBI+ηJ*dBJ+ηT*dBT=(2mB+1)λB/4;
• wherein mB is a natural number;
• and dRI=dGI=dBI, dRJ=dGJ=dBJ, dRT=dGT=dBT, mR=mG=mB, and λR, λG, λB are unequal, and thus, dRP, dGP, dBP are unequal;
• wherein the plurality of through holes in the pixel definition layer appear to be tapered, and a dimension of the through hole gradually increases from one end away from the substrate to one end close to the substrate;
• wherein the red light emitting layer comprises a main material and a doped dye, and the main material is CBP, and the doped dye is red phosphorescent dye, and the red phosphorescent dye is Ir(DBQ)2(acac);
• the green light emitting layer comprises a main material and a doped dye, and the main material is CBP, and the doped dye is green phosphorescent dye, and the green phosphorescent dye is Ir(ppy)3;
• the blue light emitting layer comprises a main material and a doped dye, and the main material is AND, and the doped dye is blue fluorescent dye, and the blue fluorescent dye is BUBD-1;
• a constitutional formula of CBP is
• a constitutional formula of Ir(DBQ)2(acac) is
• a constitutional formula of Ir(ppy)3 is
• a constitutional formula of BUBD-1 is