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US 10,313,800 B2Granted
MEMS device
AssigneeCirrus Logic, Inc.
InventorJames Thomas Deas
Life of this patent
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Abstract
MEMS devices are disclosed including a MEMS microphone device comprising a first transducer adjoining a sound port, a second transducer not adjoining a sound port, a housing defining a shared volume for the first and second transducers, and circuitry arranged to combine a first signal from the first transducer and a second signal from the second transducer to produce an output signal.
Claims17
A MEMS microphone device comprising:
- a first MEMS capacitive transducer adjoining a sound port;
- a second MEMS capacitive transducer not adjoining the sound port;
- a housing defining a shared volume for the first and second MEMS capacitive transducers;
- and
- circuitry arranged to combine a first signal from the first MEMS capacitive transducer and a second signal from the second MEMS capacitive transducer to produce an output signal, wherein the circuitry is arranged to apply a first gain to the first signal and to apply a second gain to the second signal so as to provide equal and opposite contributions to the output signal from a pressure variation in the shared volume arising from variations in power consumption of the circuitry.
2 more elements
A MEMS microphone comprising:
- a package substrate comprising a sound port;
- a first MEMS transducer comprising a first membrane, the first MEMS transducer attached to the package substrate;
- a second MEMS transducer comprising a second membrane, the second MEMS transducer attached to the package substrate to provide an acoustically closed back volume for the second MEMS transducer;
- a cover attached to the package substrate so as to define a common volume for the first and second transducers;
- and
- wherein the first transducer membrane lies in a fluid flow path between the sound port and the common volume and the second transducer membrane lies in a fluid flow path between the common volume and the back volume;
- wherein the MEMS microphone further comprises circuitry arranged to combine a first signal from the first MEMS capacitive transducer and a second signal from the second MEMS capacitive transducer to produce an output signal, wherein the circuitry is arranged to apply a first gain to the first signal and to apply a second gain to the second signal so as to provide equal and opposite contributions to the output signal from a pressure variation in the shared volume arising from variations in power consumption of the circuitry.
4 more elements
A MEMS device comprising:
- a housing;
- a first transducer within the housing;
- a second transducer within the housing;
- circuitry within the housing;
- a port for allowing sound or pressure waves to interact with the first transducer;
- wherein the circuitry is arranged to utilise a first signal from the first transducer and a second signal from the second transducer to reduce the effects on the first signal of variations in pressure within the housing arising from variations in power consumption of the circuitry.
3 more elements
Dependencies are inferred from the claim text.