Microphone and method for manufacturing the same
AssigneesHyundai Motor Company, Kia Motors Corporation
InventorIlseon Yoo
Life of this patent
Estimating the term…
Abstract
A microphone includes: a vibration electrode disposed in an upper portion of a substrate which has an acoustic hole; a fixed electrode separated from the upper portion of the vibration electrode by a reference distance and having an insulation membrane on each of an upper surface and a lower surface of the fixed electrode; and a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage.
Claims17
A microphone, comprising
- a vibration electrode disposed in an upper portion of a substrate which has an acoustic hole;
- a fixed electrode separated from an upper portion of the vibration electrode by a reference distance and having an insulation membrane on each of an upper surface and a lower surface of the fixed electrode;
- and
- a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage.
A method for manufacturing a microphone, the method comprising steps of:
- forming a vibration electrode in an upper portion of a substrate;
- forming a fixed electrode in an upper portion of the vibration electrode, the fixed electrode separated from the vibration electrode by a reference distance;
- and
- forming a piezoelectric electrode having a plurality of beams disposed in a radial direction outwards from a center of an upper portion of the fixed electrode and uniformly maintaining a space between the vibration electrode and the fixed electrode by bending the fixed electrode in one direction according to an input voltage.
Dependencies are inferred from the claim text.