Excimer laser generator and excimer laser annealing equipment

An excimer laser annealing equipment comprising an excimer laser generator;

• wherein the excimer laser generator comprises:
• a reflector, an active medium cavity and an output mirror arranged in sequence;
• the active medium cavity having a first opening facing the reflector and a second opening facing the output mirror;
• wherein the excimer laser generator further comprises two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror;
• each of the replacement units comprises a support plate and a driving component;
• the support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening;
• wherein the excimer laser generator further comprises two pressure balancing units located at the first opening and the second opening respectively;
• wherein each pressure balancing unit comprises:
• a pressure regulating cavity surrounding each replacement unit, the pressure regulating cavity being provided with a gas inlet and a gas outlet;
• a gas supply member for supplying gas to the pressure regulating cavity;
• a regulating valve provided on a communication line between the gas supply member and the gas inlet;
• and an on-off valve provided on the gas outlet;
• and
• wherein the gas supply member is a gasbag or a gas cushion.