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US 10,312,427 B2Granted
Piezoelectric device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKeiichi Umeda, Toshio Imanishi, Ville Kaajakari
Life of this patent
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Abstract
A piezoelectric device that includes: a diaphragm; a supporting part configured to support at least a portion of an end of the diaphragm; a piezoelectric film disposed along a portion supported by the supporting part on the diaphragm, a width of the film along the supported portion being narrower than a width of the portion; a lower electrode disposed at a face of the piezoelectric film on a diaphragm side; and an upper electrode disposed on a face of the piezoelectric film on an opposite side to the diaphragm.
Claims19
A piezoelectric device comprising:
- a diaphragm having a first surface and a second surface;
- a supporting part adjacent the second surface of the diaphragm and configured to support at least a portion of at least one end of opposing ends of the diaphragm;
- a piezoelectric film adjacent the first surface of the diaphragm and disposed along the portion of the at least one end of the diaphragm supported by the supporting part, wherein the piezoelectric film comprises a width that opposes the supported portion and is narrower than a width of the supported portion;
- and
- an electrode disposed on a surface of the piezoelectric film opposite to the diaphragm,
- wherein the piezoelectric film extends from the at least one end of the diaphragm towards the other end of the opposing ends of the diaphragm and does not extend to a center portion of the diaphragm between the opposing ends of the diaphragm.
3 more elements
A piezoelectric device comprising:
- a diaphragm having rectangular shape with first and second surfaces that oppose each other;
- a supporting part configured to support opposing sides of the diaphragm, the support being adjacent the second surface of the diaphragm;
- a plurality of piezoelectric films disposed adjacent the first surface of the diaphragm and along each side of the diaphragm, wherein at least a pair of the plurality of piezoelectric films are disposed along each side of the diaphragm with each piezoelectric film having a width that opposes the supported portion and the is narrower than a width of the supported portion;
- and
- a plurality of electrodes disposed on a surface of each of the piezoelectric films, respectively, opposite to the diaphragm,
- wherein each of the plurality of piezoelectric film extends towards an opposing side of the diaphragm and does not extend to a center portion of the diaphragm between the opposing sides, respectively of the diaphragm.
3 more elements
Dependencies are inferred from the claim text.