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US 10,312,319 B2Granted
Programmable charge storage arrays and associated manufacturing devices and systems
AssigneePeter C. Salmon, LLC
InventorPeter C. Salmon
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Abstract
A charge storage cell includes a conductive substrate, a substantially vertical post comprising a first insulating material coupled to the conductive substrate and a conductive cap coupled to the vertical post. The charge storage cell also includes a top side planarizing layer comprising a second insulating material and covering the conductive cap. The conductive cap will support an electric charge injected through the top side planarizing layer by a modulated charged particle beam.
Claims11
A patterning substrate comprising:
- a substrate having:
- a back surface and a front surface opposing the back surface;
- and
- a two-dimensional array of electrical charge storage cells coupled to the front surface of the substrate,
- wherein each of the electrical charge storage cells comprises:
- a conductive pad disposed in a first plane positioned at a first distance from the back surface and operable to support an electric charge;
- and
- a planarizing layer of insulating material encapsulating the conductive pad, wherein a top surface of the planarizing layer is disposed in a second plane positioned at a second distance from the back surface greater than the first distance;
- wherein the top surface of the planarizing layer is operable to receive a deposition material;
- and
- wherein each of the electrical charge storage cells is characterized by an electric field extending from the first plane through the top surface of the planarizing layer in response to the electric charge supported by the conductive pad of each electrical charge storage cell.
8 more elements
Dependencies are inferred from the claim text.