Switching element, semiconductor device, and semiconductor device manufacturing method

A semiconductor device comprising a bipolar-type variable-resistance element in a copper multilayer wiring layer on a semiconductor substrate, the bipolar-type variable-resistance element comprising a first variable-resistance element, a second variable-resistance element, a first rectifying element and a second rectifying element, and the semiconductor device comprising:

• a plurality of copper wiring lines formed in the copper multilayer wiring layer, the plurality of copper wiring lines further serving as first electrodes;
• an insulating barrier film formed on the plurality of copper wiring lines serving as first electrodes;
• an opening formed on the insulating barrier film, the opening connecting to the copper wiring line serving as a first electrode;
• a variable-resistance film formed on a plane including the opening;
• a second electrode formed on the variable-resistance film;
• and
• the first rectifying element and the second rectifying element formed on the second electrode.

A manufacturing method of a semiconductor device including a bipolar-type variable-resistance element in a copper multilayer wiring layer on a semiconductor substrate, the bipolar-type variable-resistance element comprising a first variable-resistance element, a second variable-resistance element, a first rectifying element and a second rectifying element, and the semiconductor device manufacturing method comprising:

• forming an insulating barrier film on a copper wiring, the copper wiring lines further serving as a first electrode;
• forming an opening on the insulating barrier film, the opening exposing the copper wiring serving as a first electrode;
• forming a variable-resistance film on a surface including the opening;
• forming a second electrode on the variable-resistance film;
• forming the first and a second rectifying elements above the second electrode, respectively;
• and
• forming a third electrode on the first and the second rectifying elements, respectively.