Semiconductor devices comprising protected side surfaces and related methods
AssigneeMicron Technology, Inc.
InventorsZhaohui Ma, Wei Zhou, Chee Chung So, Soo Loo Ang, Aibin Yu
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AssigneeMicron Technology, Inc.
InventorsZhaohui Ma, Wei Zhou, Chee Chung So, Soo Loo Ang, Aibin Yu
Estimating the term…
Methods of protecting semiconductor devices may involve cutting partially through a thickness of a semiconductor wafer to form trenches between stacks of semiconductor dice on regions of integrated circuitry of the semiconductor wafer. A protective material may be dispensed into the trenches and to a level at least substantially the same as a height of the stacks of semiconductor dice. Material of the semiconductor wafer may be removed from a back side thereof at least to a depth sufficient to expose the protective material in the trenches. A remaining thickness of the protective material between the stacks of semiconductor dice may be cut through.
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.