Systems and methods for bonding semiconductor elements
AssigneeKulicke and Soffa Industries, Inc.
InventorsRobert N. Chylak, Dominick A. DeAngelis
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Abstract
A method of ultrasonically bonding semiconductor elements includes the steps of: (a) aligning surfaces of a plurality of first conductive structures of a first semiconductor element to respective surfaces of a plurality of second conductive structures of a second semiconductor element, wherein the surfaces of each of the plurality of first conductive structures and the plurality of second conductive structures include aluminum; and (b) ultrasonically bonding ones of the first conductive structures to respective ones of the second conductive structures.
Claims20
A method of ultrasonically bonding semiconductor elements, the method comprising the steps of:
- (a) aligning surfaces of a plurality of first conductive structures of a first semiconductor element to respective surfaces of a plurality of second conductive structures of a second semiconductor element;
- and
- (b) ultrasonically bonding ones of the first conductive structures to respective ones of the second conductive structures.
Dependencies are inferred from the claim text.