Enhancing integrated circuit density with active atomic reservoir
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTa-Pen Guo, Ming-Hsien Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTa-Pen Guo, Ming-Hsien Lin
Estimating the term…
Methods are disclosed herein for fabricating integrated circuit interconnects that can improve electromigration. An exemplary method includes forming a first metal layer of an integrated circuit and forming a second metal layer of the integrated circuit. The first metal layer includes a first conductor electrically coupled to a second conductor, and the second metal layer includes a third conductor electrically coupled to the first conductor. The first conductor, the second conductor, and the third conductor are configured, such that electrons flow from the second conductor to an area of the first conductor where electrons flow from the third conductor to the first conductor.
A method comprising:
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Dependencies are inferred from the claim text.