Inductively coupled microelectromechanical system resonator
AssigneeTexas Instrument Incorporated
InventorsBichoy Bahr, Baher Haroun, Ali Kiaei
Life of this patent
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Abstract
An integrated circuit package includes a first die that has a microelectromechanical system (MEMS) resonator coupled to a coil. A second die includes a coil fabricated on a top surface of the second die, and an electronic circuit with tank circuit terminals fabricated on the second die and coupled to the second coil. The second die is positioned adjacent the first die such that the first coil is operable to electromagnetically couple to the second coil.
Claims20
An integrated circuit (IC) comprising:
- a first die having a first coil fabricated on a top surface of the first die, and a microelectromechanical (MEMS) resonator fabricated on the first die and coupled to the first coil;
- a second die having a second coil fabricated on a top surface of the second die, and an electronic circuit with tank circuit terminals fabricated on the second die and coupled to the second coil;
- and
- wherein the second die is positioned adjacent the first die such that the first coil is operable to electromagnetically couple to the second coil.
A method for operating an oscillator, the method comprising:
- using a microelectromechanical (MEMS) resonator as a tank circuit of the oscillator to produce a resonant frequency of operation, wherein the MEMS resonator is on a first substrate and the oscillator is on a second substrate separated from the first substrate;
- and
- inductively coupling the MEMS resonator to the oscillator using a first coil on the first substrate positioned in proximity to a second coil on the second substrate.
A method for operating an oscillator, the method comprising:
- placing a first device adjacent to a second device, wherein the first device includes a microelectromechanical (MEMS) resonator connected to a first coil, and the second device includes an oscillator circuit coupled to a second coil;
- inductively coupling the MEMS resonator to the oscillator using the first coil on the first device positioned in proximity to the second coil on the second device;
- and
- using MEMS resonator as a tank circuit of the oscillator to produce a resonant frequency of operation.
Dependencies are inferred from the claim text.