Inspection system and inspection method
AssigneeHamamatsu Photonics K.K.
InventorsShinsuke Suzuki, Hirotoshi Terada, Shunsuke Matsuda
Life of this patent
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Abstract
An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.
Claims13
An inspection system for performing laser marking on a semiconductor device having a metal layer formed on a substrate, the inspection system comprising:
- a first light source configured to output laser light;
- an optical system for laser marking configured to irradiate the semiconductor device with the laser light from the metal layer side;
- a marking controller configured to control the first light source to control the laser marking;
- an observation optical system configured to be arranged on the substrate side of the semiconductor device and to transmit light from the semiconductor device;
- a photodetector configured to detect the light from the semiconductor device through the observation optical system and to output a detection signal;
- and
- an image processor configured to generate a pattern image based on the detection signal,
- wherein the marking controller is configured to control the irradiation of the laser light so that the laser marking is performed until a mark image formed by the laser marking appears in the pattern image.
An inspection method of performing laser marking on a semiconductor device in which a metal layer is formed on a substrate, the inspection method comprising:
- performing laser marking by irradiating the semiconductor device with laser light from the metal layer side;
- transmitting light from the semiconductor device to a photodetector by using an observation optical system arranged on the substrate side of the semiconductor device;
- and
- generating a pattern image based on the light from the semiconductor device,
- wherein performing the laser marking comprises performing the irradiation of the laser light until a mark image formed by the laser marking appears in the pattern image.
Dependencies are inferred from the claim text.