Method for compensating probe misplacement and probe apparatus

A probe module, comprising:

• a fixing base;
• a probe, comprising a probe tip section and a probe body section, wherein the probe body section is fixed on the fixing base, and the probe tip section is exposed out of the fixing base;
• a temperature measurement sensor, disposed on the fixing base, to measure a temperature of a probe body of the probe body section of the probe and
• a calculation circuit, electrically connected to the temperature measurement sensor, and configured to calculate a thermal expansion amount of the probe along a length direction of the probe body section according to the temperature of the probe body, and to calculate a compensation value according to the thermal expansion amount.

A method for compensating probe misplacement, applicable to a probe module, wherein the probe module comprises a probe and a fixing base, the probe comprises a probe body section and a probe tip section, and the probe body section is fixed on the fixing base, the method for compensating probe misplacement comprising:

• measuring a temperature of a probe body of the probe body section of the probe by a temperature measurement sensor disposed on the fixing base of the probe;
• calculating, according to the temperature of the probe body, thermal expansion amount of the probe along a length direction of the probe body section by a calculation circuit electrically connected to the temperature measurement sensor;
• calculating a compensation value according to the thermal expansion amount by the calculation circuit;
• and
• moving a to-be-tested element according to the compensation value, to align the to-be- tested element with a probe tip of the probe tip section.